Chris Myrick, SemiSouth Senior Equipment Specialist, said, "We are very impressed by P+E's hydrogen purifier with the ease of operation and excellent purity. The compact purifier is a great fit for our MOCVD process.

The compact 9000MS Series purifier will purify liquid-source hydrogen for existing and additional MOCVD tools. The palladium hydrogen purifier has already produced improved process results after replacing a regenerable catalytic purifier. Chris Myrick added, "Nitrogen and hydrocarbon contamination negatively affect our SiC epi process and we are pleased to see the improved results after installing the P+E palladium purifier to remove all impurities in our hydrogen supply."

The P+E 9000MS purifier uses patented micro-channel palladium membrane technology to remove all impurities to parts-per-trillion levels. The 9000MS provides a durable, production-worthy hydrogen purifier that supports any flow rate and any inlet gas source quality. The compact design can be wall-mounted to provide ultra-high purity (UHP) hydrogen for MOCVD epitaxial processes.

According to Stuart Bestrom, "SemiSouth is part of our growing customer base doing SiC manufacturing. P+E has been supporting customers in SiC processing for over 12 years, including many leading suppliers of SiC materials and epiwafers. Many of these customers have purchased multiple systems as they have migrated and expanded their capacities from lab to production."