In a number of processes two or more components must be mixed together. In instances where it comprises a vapor of a liquid in a carrier gas, traditional Bubbler Systems and the more recent Vapor Source Controllers have been used. These devices, however, can often not handle sufficient quantities of liquid with a low vapor pressure, or perform in an imperfect way. Moreover, they cannot instantaneously provide vapor of a mixture of liquids with different vapor pressures.
Bronkhorst® have therefore developed a unique patented system to realize Mass Flow Control of Vapors with an innovation: the CEM-Liquid Delivery System (LDS). It can be applied for atmospheric, pressurized and vacuum processes, vaporizing liquid flows from 0.25 to 1200 g/h of water; for most other fluids the maximum capacity will even be higher.
At room temperature the liquid, for instance TEOS, HMDSO, Cupraselect™ or water, is drawn from a container with an inert gas blanket, or membrane, and measured by a liquid mass flow meter type μ-FLOW, LIQUI-FLOW™ or mini CORI-FLOW™. The required flow rate is controlled to the setpoint value by a control valve (C) forming an integral part of the patented liquid flow and carrier gas mixing valve (M). The then formed mixture is subsequently led into the evaporator to achieve total evaporation (E). This explains the abbreviation of CEM viz.: Control - Evaporation - Mixing, the 3 basic functions of the Liquid Delivery System.
A complete system also incorporates a readout/control unit, including power supply, for operation of the CEM-system devices.
Features
> accurately controlled gas/liquid mixture
> fast response
> high reproducibility
> very stable vapor flow
> flexible selection of gas/liquid ratio
> lower working temperature than conventional systems
> optional control by PC/PLC (RS232/fieldbus)
Liquids (selection of some for reference)
* ETOH * SnCl4 * TiCl4
* HMDSO * TCA * TMB
* HMDSn * TEOS * Water
* SiHCl3 * TIBA * Zn(C2H5)2
* SiH3Cl * Cupraselect™
* Organic compounds (such as Acetone, Alcohol, Butanol, Ethanol, Hexane, Methanol, etc.)