Description and Notes
Mattson Aspen 2 (or
equivalent). Needs to be set up for 200mm wafers.
Suggested manufacturer: Genie Scientific (or equivalent). Model
GS-111-96. Dimensions 54.5” (H) x 96” W x 33” (D). Explosion
proof lights and electrical.
Suggested manufacturer: Georgia Ovens (or equivalent). Model HT.
Temperature capability 650-700 Deg C. Vacuum capability 10-4
|Glove box (vacuum
size ~ 15” x 24”, with antichamber approximate dimensions 6” x
12”. 4 glove ports.
|Glove Box with
size about 6” x 6”. Suggested manufacturer: Innovative
Technology (Model 4GB 1800).
Roller reverse roll coater with up to 40 tons of pressure. Two
possible manufacturer: Technical Coating International and MTI
For elemental composition analysis
of thin films and particulates.
atomic, molecular structure and morphology analysis.