Greetings!
As we approach EIPBN in Portland, OR and NanoTech 2008 in Boston, I want to update you on the latest news from SEMTech Solutions. Recently we have signed an agreement with Interface, Ltd. to promote their NanoMaker EBL system add-on in North America; have made a commitment to bring in the latest model used SEMs from the most popular manufacturers; and, our partners in Japan, Elionix, recently hosted a group of U.S. university students on a NSF sponsored summer program, called NanoJapan. |
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NanoMaker EBL System add-on for SEMs
 The NanoMaker EBL system is a powerful hardware and software add-on that enables SEMs or FIBs to create 2D and 3D structures by lithographic means. Pictured is a rainbow hologram produced at Bessy in Germany using a LEO 1560 SEM with the NanoMaker complete system. SEMTech Solutions will offer a limited number of trial versions of the NanoMaker system to highly interested parties. Press Release (PDF)>>
 The unique features of the NanoMaker software are proximity effect correction and the capability to simulate EBL results before patterning 2D and 3D structures. The NanoMaker software is available for upgrades to existing SEMs with EBL add-on systems, or dedicated EBL systems that lack proximity effect correction software. The NanoMaker hardware corrects for SEM deflection distortions and offers the capability to expose without a beam blanker. The NanoMaker will be installed on a KLA-Tencor 8" FE-SEM in our demonstration lab. NanoMaker Brochure (PDF)>> | |
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Elionix hosts U.S. Students Representing NanoJapan
Elionix, a world leading supplier of Electron Beam Lithography equipment, recently hosted a group of outstanding university students selected for the NanoJapan program. This Rice University-based program has been awarded the Andrew Heiskell Award for Innovation in International Education.
 NanoJapan is based on a partnership with the National Science Foundation in which 16 U.S. undergraduate science and engineering students travel to Japan to work in leading nanotechnology laboratories during the summer. At the Elionix NanoTech Center in Tokyo, Japan, the students were introduced to SEM and EBL manufacturing, as well as nanolithography processing. For more information on NanoJapan, visit http://nanojapan.rice.edu. |
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Used SEM Spotlight: JEOL 5900LV & 6340F SEMTech Solutions has recently acquired the JEOL 5900LV and the JEOL 6340F SEMs. Demonstrations on these systems will be available starting in July.
 The 5900LV is a Variable Pressure SEM that features a motorized 5 axis stage with an 8" chamber for large specimens. Resolution specifications for the SE are 3 nm @ 30 kV, and 5 nm @ 30 kV for the BSE. The system comes equipped with an Oxford EDS system, Robinson Chamberview, and BSE detector. Pressure is adjustable from 10 to 270 Pa.
 The semi-in-lens design of the JEOL 6340F is optimized for the smallest possible aberrations, allowing for high-magnification observation at low accelerating voltages. As compared with a conventional FE electron gun, the conical lens causes very little positional shift when the accelerating voltage is changed. Imaging resolution of the JSM-6340F is 1.2 nm at 15 kV and 2.5 nm at 1 kV. The system also comes equipped with an Oxford EDX system.
A complete listing of all our used and refurbished SEMs can be found on our website at www.semtechsolutions.com/CurrentSemList.pdf. Each SEM can be demonstrated with your samples to assure you purchase the best SEM for your application and budget. |
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Sincerely,
SEMTech Solutions, Inc.
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At SEMTech Solutions we buy and sell top quality used SEMs at reasonable prices. When we buy the SEM, we take the necessary time to recondition and test each system before selling them to you. Recently we acquired a LEO 1560 FE-SEM. This SEM with Gemini Column achieves better than 3 nm at 1 kV accelerating voltage. This system is equipped with an 8" airlock which will accept samples up to 45 mm high. The eucentric stage permits full coverage of a 6" photomask. Other options on the LEO 1560 FE-SEM include a Robinson BSE detector, a PGT 2000 EDX system, and an IR Chamberview system. More (PDF)>>
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Upcoming Tradeshows
May 27-30
Portland, OR
Booth #616
June 1-5
Boston, MA
Booth #430
October 5-9
Pittsburgh, PA
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